Thermodynamic computations of the interaction coefficients between boron and phosphorus and common impurity elements in liquid silicon
Thermodynamic computations of the interaction coefficients between boron and phosphorus and common impurity elements in liquid silicon Halvor Dalaker SINTEF Materials and Chemistry, 7465 Trondheim, Norway. DOI: https://doi.org/10.7494/cmms.2013.3.0459 Abstract: Using the thermodynamic software FACT, and the SINTEF database for high purity silicon, the interaction coefficients between the doping elements boron and phosphorus and a range … Read more