Stress analysis of silicon-titanium coating created by ion beam sputter deposition
Stress analysis of silicon-titanium coating created by ion beam sputter deposition Jacek Rońda, Wojciech Rajchel, Paweł Wojnarowski Department of Applied Computer Science and Modelling,Faculty of Metals Engineering and Industrial Computer Science,AGH University of Science and Technology, al. Mickiewicza 30, 30-059 Kraków, Poland. DOI: https://doi.org/10.7494/cmms.2009.1.0215 Abstract: The paper is devoted to the analysis of internal stresses … Read more