On prognosis of variation of properties of epitaxial layers by choosing of temperature field during growth
On prognosis of variation of properties of epitaxial layers by choosing of temperature field during growth Evgeny L. Pankratov1, 2 1Nizhny Novgorod State University, 23 Gagarin avenue, Nizhny Novgorod, 603950, Russia. 2Nizhny Novgorod State Technical University, 24 Minin Street, Nizhny Novgorod, 603950, Russia. DOI: https://doi.org/10.7494/cmms.2020.1.0648 Abstract: In this paper, we analyze the influence of the … Read more