Bi-velocity reactive mass transport phenomenology. Modeling of CVD process
Bi-velocity reactive mass transport phenomenology. Modeling of CVD process Bartek Wierzba Interdisciplinary Centre for Materials Modelling, FMSci&C, AGH University of Science,and Technology, Al. Mickiewicza 30, 30-059 Kraków, Poland. DOI: https://doi.org/10.7494/cmms.2011.2.0355 Abstract: This paper presents a numerical method to determine the concentration profile during the aluminization process. The quantitative description of the diffusion controlled Chemical Vapor … Read more